This listing is for a New dual sputter head magnetron sputter coater system (two sputtering targets).
DC Magnetron Sputter Coater with Turbo Pump (Japan), a RV12 Edwards Pump, water chiller, thickness monitor, with all parts.
With turbo pump, vaccuum up to 0.01 Pa.
Diameter of sputter head (target) is 50 mm. Each sputter heater is equipped with a shutter. Can sputter two kinds of metals simutaneously or sequentially (two DC magnetron sputter power supply).
Stainless steel vacuum bell jar with diameter of 300 mm and height of 320 mm, with various feedthrough. Base can be rotated (speed adjustable) and diameter is 150 mm (can putter >250 mm diameter sample).
With turbo pump, the vacuum can be very high such that oxiditive metals can be sputtered, such as copper, aluminum, chromium, etc. as well as precious metal such as gold, slver, and Pt.
Distance between sputter head to the sample can be adjusted. The sputter head tilt angle can be adjusted.
With water chiller, with external Edwards RC12 vacuum pump.
With quartz thickness monitor.
208 V single phase, 4 kW.
In stock located in State College, PA, USA
It can be used to sputter coat targets such as Gold, and also targets that may need pre-cleaning for the removal of oxide layers, such as Chromium.
A shutter assembly is fitted as standard, which allows a sputter cleaning and the sputter coating cycle to be carried out while maintaining the vacuum.