This listing is for a lightly-used three-head DC magnetron sputter coater system (three sputtering targets).
Magnetron Sputter Coater with Turbo Pump, a RV12 Edwards Pump, water chiller, with all parts.
With turbo pump, vaccuum up to 0.001 Pa. We used it to sputter Cr, Cu, Au, or Ag on piezo PVDF film with good quality.
Diameter of sputter target is 100 mm. Each sputter head is equipped with a shutter and cooling water. Can sputter three kinds of metals simutaneously or sequentially (three DC magnetron sputter power supply).
Stainless steel vacuum bell jar with diameter of 500 mm and height of 600 mm, with various feedthrough. Base can be rotated (speed adjustable) and diameter is 175 mm (can putter ~400 mm diameter sample or 250 mm square).
The distance from the sputter target to the sample can be adjusted. The sputter target head tilt angle can be adjusted.
With turbo pump, the vacuum can be very high such that oxiditive metals can be sputtered, such as copper, aluminum, chromium, etc. as well as precious metal such as gold, slver, and Pt.
With additional KF40 and CF40 feedthroughs.
Require Argon and compressed air to run.
The chamber is equipped with heaters that can be used to improve the vacuum.
There is one 4" diameter observation glass window in the front, a neon light on the back of the chamber for the user to watch the sputtering process.
With water chiller, with external Edwards RC12 vacuum pump.
Quartz thickness monitor can be added with additional cost.
208 V single phase, 4 kW.
In stock located in State College, PA, USA