30L RF Plasma Cleaner 500 W Vacuum 300 mm x 300 mm x 350 mm

Specifications

1. RF Plasma output power: up to 500 W, adjustable
2. Plasma frequency: 13.56 MHz
3. Vacuum chamber size: 300 mm x 300 mm x 350 mm
4. Treat both surfaces in one run
5. Vacuum level: <5 Pa
6. Plasma working vacuum: 0-40 Pa
7. Two-stage mechanical pump, controlled by main control system
8. Two gas inlets and flowmeters to control two types of gases during plasma. This unit has digital MFC gas flow meter to control the gas feeding from touch screen (200 SCCM or 500 SCCM, for nitrogen and argon).
9. RF auto tuning, reflection power < 100 W.
10. Air cooling
11. 208 V single phase, 2 kW. A 5 kWA 110-220 V up transformer can be provided if you do not have 208 V in your lab.

Touch screen controller

Soft plasma can clean the surface (remove contamination) and even make the surface reactive. Therefore significantly enhance its adhesion to coating and electrodes (gold, silver, copper, aluminum, etc). Comparing with corona surface treatment, it will cause less thermal damage to thin and delicate plastic film such as thin piezo film.

 

Perfect for batch process of paper or plastic sheet to enhance their surface energy for adhesion (lamination) or wetting property for printing, painting.

 

It can also be used to process large size irregular 3D objects as long as it can be fit into the chamber [such objects are usually impossible for corona treatment]