Electrode deposition by Magnetron Sputtering with Emitech K675X sputter with turbo pump. Price is for one run with thickness up to 100 nm. Chamber diameter is 280 mm. can fit 180 mm x 180 mm squre or other dimension (edges may be thinner)
It can be used for customer designed piezo sensors, EAP actuators, ultrasound transducers, electrocaloric ECE cooling device, and any other applications.