Electrode deposition by Magnetron Sputtering with Emitech K675X or K575X sputter with turbo pump.
Price is for one run with thickness up to 100 nm. Chamber diameter is 280 mm/150mm. Can fit 200 mm x 200 mm squre or other dimension (edges may be thinner)
It can be used for customer designed piezo sensors, EAP actuators, ultrasound transducers, electrocaloric ECE cooling device, and any other applications.
We can also provide special masks based on customer design with additional cost.
This list is for 100 nm thick silver
Two Metal electrodes: Gold or Silver
Two Sizes: 100 mm x 100 mm or 200 mm x 200 mm
Price is for ONLY ONE surface